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Electrostatic actuation of surface/bulk micromachined single-crystal silicon microresonators.
Sangwoo Lee
Sangjun Park
Sangwoo Yi
Sangchul Lee
Dong-Il Dan Cho
Byeoungju Ha
Yongsoo Oh
Cimoo Song
Published in:
IROS (1999)
Keyphrases
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si sio
space charge
silicon dioxide
electric field
three dimensional
low cost
degrees of freedom
surface reconstruction
free form
normal vectors
d objects
mathematical model
range data
high density
smooth surfaces
surface points