Optical measurement system for characterizing compound semiconductor interface and surface states.
Matthias PasslackRonald N. LeggeDiana ConveyZhiyi YuJonathan K. AbrokwahPublished in: IEEE Trans. Instrum. Meas. (1998)
Keyphrases
- closely spaced
- light scattering
- white light
- three dimensional
- d objects
- optical properties
- gallium arsenide
- user interface
- user friendly
- white light interferometry
- semiconductor manufacturing
- smooth surfaces
- surface reconstruction
- normal vectors
- surface points
- curved surfaces
- motion parallax
- range data
- multi view
- silicon dioxide
- plasma etching
- viewpoint
- image segmentation