Quantum size impacts on the threshold voltage in nanocrystalline silicon thin film transistors.
Lingfeng MaoPublished in: Microelectron. Reliab. (2013)
Keyphrases
- thin film
- high density
- short circuit
- field effect transistors
- grain size
- solar cell
- plasma etching
- room temperature
- low density
- space charge
- data center
- electric field
- chemical vapor deposition
- chance discovery
- semiconductor devices
- electron microscopy
- database
- silicon nitride
- electrical properties
- low voltage
- integrated circuit
- multi layer
- database systems