Thin-Film FD-SOI BIMOS Topologies for ESD Protection.

Louise De Conti Sorin Cristoloveanu Maud Vinet Philippe Galy

Published in: IRPS (2019)

Keyphrases

thin film
short circuit
high density
information security
grain size
electron microscopy
multi layer
solar cell
plasma etching
film thickness
chemical vapor deposition
high speed
white light interferometry