Silicon Nitride in Silicon Photonics.

Daniel J. Blumenthal René G. Heideman Douwe Geuzebroek Arne Leinse Chris Roeloffzen

Published in: Proc. IEEE (2018)

Keyphrases

silicon dioxide
silicon nitride
thin film
high temperature
plasma etching
space charge
high density
electrical properties
low cost
solar cell
artificial intelligence
image segmentation
wireless sensor networks
high speed
data mining
search engine
gate dielectrics