Electrical and structural properties of hafnium silicate thin films.
Ivona Z. MitrovicOctavian BuiuSteve HallC. BungeyT. WagnerW. DaveyY. LuPublished in: Microelectron. Reliab. (2007)
Keyphrases
- structural properties
- thin film
- short circuit
- high density
- tree width
- grain size
- network evolution
- low voltage
- leakage current
- topological properties
- multi layer
- room temperature
- white light interferometry
- chemical vapor deposition
- film thickness
- solar cell
- learning algorithm
- transmission electron microscopy
- low density
- query processing
- social networks