Fabrication of horizontal three-layer SiO2-slot waveguide sandwiched by Nb2O5.
Takumi HinataYoshiki HayamaYuki ShimamuraKatsumi NakatsuharaPublished in: OECC/PSC (2022)
Keyphrases
- waveguide
- silicon dioxide
- electrical properties
- naive bayes
- decision trees
- integrated circuit
- application layer
- multi layer
- high density
- naive bayesian
- semiconductor devices
- high data rate
- logistic regression
- electron beam
- dual band
- high temperature
- metal oxide
- antenna array
- text categorization
- computer simulation
- low cost