A Novel Actuator for High-Precision Alignment in a Nano-Imprint Multi-Layers-Interconnection Fabrication.

Tat Joo Teo I-Ming Chen Guilin Yang Wei Lin

Published in: ICRA (2007)

Keyphrases

high precision
high recall
high density
high reliability
high accuracy
achieve high precision
closed loop
multi layer
real world
neural network
control system
dynamic time warping
multiple layers
metadata
pairwise
hidden markov models
real time
computer vision
artificial intelligence
image alignment
data sets