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Microstructure simulation of grain growth in Cu through silicon vias using phase-field modeling.

Nabi NabiollahiNele MoelansMario GonzalezJoke De MessemaekerChristopher J. WilsonKristof CroesEric BeyneIngrid De Wolf
Published in: Microelectron. Reliab. (2015)
Keyphrases
  • mechanical properties
  • mathematical model
  • high density
  • discrete event simulation
  • data mining
  • low cost
  • high speed
  • simulation model
  • growth rate
  • agent based modeling
  • learning algorithm
  • physical models