Generative Pre-Training of Time-Series Data for Unsupervised Fault Detection in Semiconductor Manufacturing.
Sewoong LeeJinKyou ChoiMin Su KimPublished in: CoRR (2023)
Keyphrases
- fault detection
- semiconductor manufacturing
- fault diagnosis
- supervised learning
- industrial processes
- unsupervised learning
- discrete event simulation
- fault identification
- condition monitoring
- fault detection and diagnosis
- failure detection
- process control
- supervised training
- tennessee eastman
- fault localization
- discriminative training
- neural network
- semi supervised
- fuel cell
- robust fault detection
- power plant
- production system
- training set
- data warehouse
- generative model
- fault isolation
- control system
- search algorithm
- machine learning