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The effect of silicon films impurity compensation on the performance of silicon drift detector.
Wei Luo
Rui Jia
Longjie Wang
Chunlin Guo
Shuai Jiang
Xiaorang Tian
Xiaoping Ouyang
Xing Li
Published in:
Microelectron. J. (2023)
Keyphrases
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silicon dioxide
transmission electron microscopy
space charge
chemical vapor deposition
high speed
plasma etching
gallium arsenide
high density
low cost
multiscale
x ray
film restoration
silicon nitride
genetic algorithm
video sequences