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Perimeter effects from interfaces in ultra-thin layers deposited on nanometer-deep p+n silicon junctions.
Tihomir Knezevic
Lis K. Nanver
Tomislav Suligoj
Published in:
MIPRO (2017)
Keyphrases
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electron microscopy
high speed
multiple layers
low cost
transmission electron microscopy
multiscale
connected components
multi layer
high density
chemical vapor deposition
real time
data sets
information systems
x ray