Login / Signup

Autonomous sputter synthesis of thin film nitrides with composition controlled by Bayesian optimization of optical plasma emission.

Davi M. FebbaKevin R. TalleyKendal JohnsonStephen SchaeferSage R. BauersJohn S. MangumRebecca W. SmahaAndriy Zakutayev
Published in: CoRR (2023)
Keyphrases