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Rebecca W. Smaha
Publication Activity (10 Years)
Years Active: 2023-2023
Publications (10 Years): 1
Top Topics
Grain Size
Plasma Etching
Efficient Optimization
Thin Film
Top Venues
CoRR
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Publications
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Davi M. Febba
,
Kevin R. Talley
,
Kendal Johnson
,
Stephen Schaefer
,
Sage R. Bauers
,
John S. Mangum
,
Rebecca W. Smaha
,
Andriy Zakutayev
Autonomous sputter synthesis of thin film nitrides with composition controlled by Bayesian optimization of optical plasma emission.
CoRR
(2023)