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Crack-guided effect on dynamic mechanical stress for foldable low temperature polycrystalline silicon thin film transistors.
Sang Myung Lee
Chuntaek Park
Ilgu Yun
Published in:
Microelectron. Reliab. (2016)
Keyphrases
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thin film
high density
solar cell
plasma etching
low density
chemical vapor deposition
short circuit
multi layer
data center
electron microscopy
silicon nitride
grain size
white light interferometry
room temperature
genetic algorithm
expert systems
database