Characterizing Dielectric Permittivity of Nanoscale Dielectric Films by Electrostatic Micro-Probe Technology: Finite Element Simulations.
He RenWei-Feng SunPublished in: Sensors (2019)
Keyphrases
- finite element
- chemical vapor deposition
- electrical properties
- silicon dioxide
- thin film
- gate dielectrics
- finite element analysis
- mesh generation
- finite element method
- gate insulator
- finite difference
- numerical solution
- high density
- soft tissue
- boundary element
- gpu accelerated
- silicon nitride
- finite element model
- transmission line
- shear stress
- biomechanical model
- numerical simulations
- computer systems