Student Realization in Cleanroom of Silicon-Germanium Thin Film Transistors.
D. GuilletK. MourguesR. RogelH. LhermiteOlivier BonnaudPublished in: MSE (1999)
Keyphrases
- thin film
- high density
- solar cell
- low density
- plasma etching
- data center
- learning environment
- field effect transistors
- high impact
- grain size
- learning styles
- chemical vapor deposition
- electron microscopy
- short circuit
- student learning
- chance discovery
- intelligent tutoring systems
- decision support system
- space charge
- databases