Water-enhanced negative bias temperature instability in p-type low temperature polycrystalline silicon thin film transistors.
Meng ZhangWei ZhouRongsheng ChenMan WongHoi-Sing KwokPublished in: Microelectron. Reliab. (2014)
Keyphrases
- thin film
- high density
- chemical vapor deposition
- room temperature
- solar cell
- film thickness
- plasma etching
- data center
- short circuit
- low density
- electron microscopy
- grain size
- field effect transistors
- relative humidity
- space charge
- silicon nitride
- learning algorithm
- white light interferometry
- single view
- knowledge discovery
- artificial neural networks
- data analysis