Automatic Inspection for Wafer Defect Pattern Recognition with Unsupervised Clustering.
Katherine Shu-Min LiLeon Li-Yang ChenKen Chau-Cheung ChengPeter Yi-Yu LiaoSying-Jyan WangAndrew Yi-Ann HuangNova Cheng-Yen TsaiLeon ChouGus Chang-Hung HanJwu E. ChenHsing-Chung LiangChun-Lung HsuPublished in: ETS (2021)
Keyphrases
- unsupervised clustering
- automatic inspection
- pattern recognition
- vision system
- supervised classification
- k means
- semi supervised clustering
- clustering method
- clustering algorithm
- computer vision
- image segmentation
- machine learning
- image processing
- neural network
- real time
- fuzzy c means
- pattern classification
- dimensionality reduction
- fuzzy sets
- data sets
- machine vision
- spectral clustering
- license plate
- supervised learning
- information retrieval