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Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD.
Yonggyun Park
Pengzhan Liu
Seunghwan Lee
Jinill Cho
Eric Joo
Hyeong-U. Kim
Taesung Kim
Published in:
Sensors (2023)
Keyphrases
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thin film
electron microscopy
room temperature
silicon nitride
high density
short circuit
grain size
frequency domain
high frequency
multi layer
chemical vapor deposition
plasma etching
database
decision support system
sensor networks
hidden markov models
decision making
solar cell