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Eric Joo
Publication Activity (10 Years)
Years Active: 2023-2023
Publications (10 Years): 1
Top Topics
Solar Cell
High Density
Silicon Nitride
Thin Film
Top Venues
Sensors
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Publications
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Yonggyun Park
,
Pengzhan Liu
,
Seunghwan Lee
,
Jinill Cho
,
Eric Joo
,
Hyeong-U. Kim
,
Taesung Kim
Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD.
Sensors
23 (12) (2023)