Nanoindentation-induced phase transformation in crystalline silicon and relaxed amorphous silicon.
R. RaoJ. E. BradbyS. RuffellJ. S. WilliamsPublished in: Microelectron. J. (2007)
Keyphrases
- transmission electron microscopy
- liquid crystal
- low cost
- thin film
- high density
- x ray
- plasma etching
- high speed
- gallium arsenide
- databases
- silicon dioxide
- chemical vapor deposition
- space charge
- optimal solution
- linear transformation
- high resolution
- artificial neural networks
- case study
- image processing
- information systems
- machine learning