Synthesis of an event based supervisor for deadlock avoidance in semiconductor manufacturing systems.
Wenle ZhangZiqiang John MaoPublished in: ACC (2004)
Keyphrases
- manufacturing systems
- petri net
- flexible manufacturing systems
- manufacturing environment
- manufacturing processes
- quality control
- shop floor
- complex systems
- deadlock detection
- semiconductor manufacturing
- production rate
- gallium arsenide
- holonic manufacturing systems
- control structure
- event driven
- assembly line
- production line
- texture synthesis
- manufacturing enterprises
- production cost
- manufacturing cell
- distributed systems
- publish subscribe
- production scheduling
- plasma etching