Ziqiang John Mao

Publication Activity (10 Years)

Years Active: 2004-2004
Publications (10 Years): 0

Publications

Wenle Zhang, Ziqiang John Mao
Synthesis of an event based deadlock avoidance supervisor for semiconductor manufacturing systems with choices in process flows. CDC (2004)
Wenle Zhang, Ziqiang John Mao
Synthesis of an event based supervisor for deadlock avoidance in semiconductor manufacturing systems. ACC (2004)
Wei Kang, Ziqiang John Mao
control for photolithography manufacturing process. ACC (2004)
Wei Kang, Ziqiang John Mao
An adaptive model for the control of critical dimension in photolithography process. CDC (2004)