An adaptive model for the control of critical dimension in photolithography process.
Wei KangZiqiang John MaoPublished in: CDC (2004)
Keyphrases
- reasoning process
- conceptual model
- process model
- feedback loops
- control structure
- generation process
- control strategies
- optimization process
- metamodel
- formal model
- statistical model
- similarity measure
- high level
- theoretical framework
- computational model
- theoretical analysis
- prediction model
- management system
- manufacturing systems
- probability distribution
- diffusion process
- prior knowledge
- objective function
- decision making