Polarization Property Associated with Surface Plasmon Resonance in a Palladium Thin-Film Coated Aluminum Grating in a Conical Mounting and Its Application to Hydrogen Gas Detection.
Toyonori MatsudaIsao TsunodaShinichiro KobaYu OshiroHiroyuki OdagawaPublished in: Sensors (2024)
Keyphrases
- thin film
- chemical vapor deposition
- film thickness
- white light interferometry
- short circuit
- high density
- multi layer
- electron microscopy
- room temperature
- genetic algorithm
- silicon nitride
- steady state
- grain size
- three dimensional
- surface reconstruction
- d objects
- database systems
- neural network
- decision makers
- range data
- database
- low cost
- plasma etching