Fabrication of Weak C-Axis Preferred AlN Thin Film for Temperature Measurement.

Ling Dong Yang Li Jingwen Lv Hongchuan Jiang Wanli Zhang

Published in: Sensors (2021)

Keyphrases

thin film
chemical vapor deposition
high density
room temperature
plasma etching
film thickness
short circuit
low density
solar cell
multi layer
data center
liquid crystal displays
decision making
electron microscopy
electrical properties
white light interferometry
grain size
computer conferencing
genetic algorithm