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Performance and Reliability of Nanosheet Oxide Semiconductor FETs with ALD-Grown InGaO for 3D Integration (Invited).

Masaharu KobayashiKaito HikakeZhuo LiJunxiang HaoChitra PandyTakuya SarayaToshiro HiramotoTakanori TakahashiMutsunori UenumaYukiharu Uraoka
Published in: IRPS (2024)
Keyphrases
  • information integration
  • silicon dioxide
  • reliability analysis
  • reliability assessment
  • real time
  • databases
  • information retrieval
  • genetic algorithm
  • electron microscopy
  • fuel cell
  • plasma etching