Performance and Reliability of Nanosheet Oxide Semiconductor FETs with ALD-Grown InGaO for 3D Integration (Invited).
Masaharu KobayashiKaito HikakeZhuo LiJunxiang HaoChitra PandyTakuya SarayaToshiro HiramotoTakanori TakahashiMutsunori UenumaYukiharu UraokaPublished in: IRPS (2024)