Vapor Deposition of Fluoropolymer Thin Films for Antireflection Coating.

Soma Yasui Fujio Ohishi Hiroaki Usui

Published in: IEICE Trans. Electron. (2023)

Keyphrases

thin film
high density
manufacturing process
plasma etching
fiber optic
chemical vapor deposition
short circuit
grain size
tool wear
diffusion process
multi layer
solar cell
fluidized bed
white light interferometry
room temperature
viewpoint