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A new strategy for defect inspection by the virtual inspection in semiconductor wafer fabrication.
Jason Chao-Hsien Pan
Damon H. E. Tai
Published in:
Comput. Ind. Eng. (2011)
Keyphrases
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wafer fabrication
defect detection
automated visual inspection
computer vision
augmented reality
quality control
feature extraction
evolutionary algorithm
automatic inspection
dispatching rule
databases
data mining
social networks
special case
virtual environment
visual inspection