Tyler Parent

Publication Activity (10 Years)

Years Active: 2000-2002
Publications (10 Years): 0

Publications

I. G. Rosen, Tyler Parent, Baris Fidan, Chunming Wang, Anupam Madhukar
Design, development, and testing of real-time feedback controllers for semiconductor etching processes using in situ spectroscopic ellipsometry sensing. IEEE Trans. Control. Syst. Technol. 10 (1) (2002)
Anupam Madhukar, Tyler Parent, I. Gary Rosen, Chunming Wang
An Elementary Model for Control of a Semiconductor Etching Process. SIAM Rev. 44 (4) (2002)
I. Gary Rosen, Tyler Parent, Carolyn Cooper, Ping Chen, Anupam Madhukar
A neural-network-based approach to determining a robust process recipe for the plasma-enhanced deposition of silicon nitride thin films. IEEE Trans. Control. Syst. Technol. 9 (2) (2001)
Baris Fidan, I. G. Rosen, Tyler Parent, Anupam Madhukar
plasma etching of silicon nitride thin films. ACC (2001)
Baris Fidan, Tyler Parent, I. G. Rosen, Anupam Madhukar
plasma etching of silicon nitride. ACC (2000)