Carolyn Cooper

Publication Activity (10 Years)

Years Active: 2001-2001
Publications (10 Years): 0

Publications

I. Gary Rosen, Tyler Parent, Carolyn Cooper, Ping Chen, Anupam Madhukar
A neural-network-based approach to determining a robust process recipe for the plasma-enhanced deposition of silicon nitride thin films. IEEE Trans. Control. Syst. Technol. 9 (2) (2001)