Design, development, and testing of real-time feedback controllers for semiconductor etching processes using in situ spectroscopic ellipsometry sensing.
I. G. RosenTyler ParentBaris FidanChunming WangAnupam MadhukarPublished in: IEEE Trans. Control. Syst. Technol. (2002)
Keyphrases
- real time
- design process
- control system
- design principles
- knowledge based systems
- embedded software
- support systems
- software engineering
- case study
- design theory
- design decisions
- formative evaluation
- sensor networks
- development processes
- design processes
- development process
- controller design
- rapid prototyping
- hardware software co design
- software testing
- design tools
- integrated circuit
- engineering design
- software architecture
- data acquisition
- information processing
- software development
- high speed