An Elementary Model for Control of a Semiconductor Etching Process.
Anupam MadhukarTyler ParentI. Gary RosenChunming WangPublished in: SIAM Rev. (2002)
Keyphrases
- conceptual model
- process model
- theoretical framework
- computational model
- high level
- objective function
- feedback loops
- neural network
- experimental data
- theoretical analysis
- fuzzy logic
- cost function
- em algorithm
- software engineering
- parameter estimation
- design process
- probability distribution
- probabilistic model
- mathematical model
- control system
- neural network model
- metamodel
- control strategies
- similarity measure