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Thomas Uhrmann
Publication Activity (10 Years)
Years Active: 2013-2016
Publications (10 Years): 1
Top Topics
Global Alignment
Recent Progress
High Density
Intelligent Control
Top Venues
3DIC
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Publications
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Joeri De Vos
,
Lan Peng
,
Alain Phommahaxay
,
Joost Van Ongeval
,
Andy Miller
,
Eric Beyne
,
Florian Kurz
,
Thomas Wagenleiter
,
Markus Wimplinger
,
Thomas Uhrmann
Importance of alignment control during permanent bonding and its impact on via-last alignment for high density 3D interconnects.
3DIC
(2016)
Thomas Uhrmann
,
Thorsten Matthias
,
Markus Wimplinger
,
Jurgen Burggraf
,
Daniel Burgstaller
,
Harald Wiesbauer
,
Paul Lindner
Recent progress in thin wafer processing.
3DIC
(2013)