Mark G. Nolan

Publication Activity (10 Years)

Years Active: 2014-2016
Publications (10 Years): 1

Top Topics

Integrated Circuit

Multiresolution

Top Venues

Publications

Wenke Weinreich, Konrad Seidel, Patrick Polakowski, Maximilian Drescher, A. Gummenscheimer, Mark G. Nolan, L. Cheng, D. H. Triyoso
La-doped ZrO2 based BEoL decoupling capacitors. ICICDT (2016)
Wenke Weinreich, Konrad Seidel, Patrick Polakowski, Stefan Riedel, Lutz Wilde, Dina H. Triyoso, Mark G. Nolan
ALD ZrO2 processes for BEoL device applications. ICICDT (2014)
D. H. Triyoso, Wenke Weinreich, Konrad Seidel, Mark G. Nolan, Patrick Polakowski, D. Utess, Susanne Ohsiek, K. Dittmar, M. Weisheit, M. Licbau, R. Fox
ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM. ICICDT (2014)