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M. Licbau
Publication Activity (10 Years)
Years Active: 2014-2014
Publications (10 Years): 0
Top Topics
Multiresolution
High Frequency
Top Venues
ICICDT
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Publications
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D. H. Triyoso
,
Wenke Weinreich
,
Konrad Seidel
,
Mark G. Nolan
,
Patrick Polakowski
,
D. Utess
,
Susanne Ohsiek
,
K. Dittmar
,
M. Weisheit
,
M. Licbau
,
R. Fox
ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM.
ICICDT
(2014)