ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM.

D. H. Triyoso Wenke Weinreich Konrad Seidel Mark G. Nolan Patrick Polakowski D. Utess Susanne Ohsiek K. Dittmar M. Weisheit M. Licbau R. Fox

Published in: ICICDT (2014)

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