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ALD ZrO2 processes for BEoL device applications.

Wenke WeinreichKonrad SeidelPatrick PolakowskiStefan RiedelLutz WildeDina H. TriyosoMark G. Nolan
Published in: ICICDT (2014)
Keyphrases
  • computer vision
  • case study
  • process model
  • machine learning
  • learning algorithm
  • multiscale
  • objective function
  • digital libraries