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Lutz Wilde
Publication Activity (10 Years)
Years Active: 2014-2014
Publications (10 Years): 0
Top Topics
Multiscale
Process Model
Digital Libraries
Top Venues
ICICDT
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Publications
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Wenke Weinreich
,
Konrad Seidel
,
Patrick Polakowski
,
Stefan Riedel
,
Lutz Wilde
,
Dina H. Triyoso
,
Mark G. Nolan
ALD ZrO2 processes for BEoL device applications.
ICICDT
(2014)