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E. Kunnen
Publication Activity (10 Years)
Years Active: 2005-2017
Publications (10 Years): 1
Top Topics
Integrated Circuit
Root Mean Square
Cross Section
Electron Beam
Top Venues
ESSDERC
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Publications
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Tom Schram
,
Quentin Smets
,
Benjamin Groven
,
M. H. Heyne
,
E. Kunnen
,
A. Thiam
,
Katia Devriendt
,
Annelies Delabie
,
Dennis Lin
,
M. Lux
,
Daniele Chiappe
,
I. Asselberghs
,
S. Brus
,
Cedric Huyghebaert
,
S. Sayan
,
A. Juncker
,
Matty Caymax
,
Iuliana P. Radu
WS2 transistors on 300 mm wafers with BEOL compatibility.
ESSDERC
(2017)
E. Sleeckx
,
Marc Schaekers
,
X. Shi
,
E. Kunnen
,
B. Degroote
,
M. Jurczak
,
M. de Potter de ten Broeck
,
E. Augendre
Optimization of low temperature silicon nitride processes for improvement of device performance.
Microelectron. Reliab.
45 (5-6) (2005)