E. Augendre

Publication Activity (10 Years)

Years Active: 2005-2005
Publications (10 Years): 0

Publications

E. Sleeckx, Marc Schaekers, X. Shi, E. Kunnen, B. Degroote, M. Jurczak, M. de Potter de ten Broeck, E. Augendre
Optimization of low temperature silicon nitride processes for improvement of device performance. Microelectron. Reliab. 45 (5-6) (2005)