Optimization of low temperature silicon nitride processes for improvement of device performance.
E. SleeckxMarc SchaekersX. ShiE. KunnenB. DegrooteM. JurczakM. de Potter de ten BroeckE. AugendrePublished in: Microelectron. Reliab. (2005)
Keyphrases
- global optimization
- optimization model
- thin film
- information systems
- optimization method
- significant improvement
- optimization algorithm
- optimization strategies
- optimization methods
- augmented reality
- optimization problems
- website
- feature selection
- real world
- probability distribution
- evolutionary algorithm
- mobile devices
- computational models
- artificial neural networks
- optimization process
- joint optimization
- information retrieval