WS2 transistors on 300 mm wafers with BEOL compatibility.

Tom Schram Quentin Smets Benjamin Groven M. H. Heyne E. Kunnen A. Thiam Katia Devriendt Annelies Delabie Dennis Lin M. Lux Daniele Chiappe I. Asselberghs S. Brus Cedric Huyghebaert S. Sayan A. Juncker Matty Caymax Iuliana P. Radu

Published in: ESSDERC (2017)

Keyphrases