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Daniele Pagano
ORCID
Publication Activity (10 Years)
Years Active: 2013-2023
Publications (10 Years): 2
Top Topics
Semiconductor Manufacturing
Plasma Etching
Low Density
Data Quality
Top Venues
Sensors
WSC
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Publications
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Umberto Amato
,
Anestis Antoniadis
,
Italia De Feis
,
Domenico Fazio
,
Caterina Genua
,
Irène Gijbels
,
Donatella Granata
,
Antonino La Magna
,
Daniele Pagano
,
Gabriele Tochino
,
Patrizia Vasquez
Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry.
Sensors
23 (14) (2023)
Geert H. van Kollenburg
,
Richard Verhoeven
,
Mike Holenderski
,
Nirvana Meratnia
,
Daniele Pagano
Modeling Multivariate Relations in Multiblock Semiconductor Manufacturing Data Using Process PLS To Enhance Process Understanding.
WSC
(2023)
Gian Antonio Susto
,
Andrea Schirru
,
Simone Pampuri
,
Daniele Pagano
,
Seán F. McLoone
,
Alessandro Beghi
A predictive maintenance system for integral type faults based on support vector machines: An application to ion implantation.
CASE
(2013)
Gian Antonio Susto
,
Seán F. McLoone
,
Daniele Pagano
,
Andrea Schirru
,
Simone Pampuri
,
Alessandro Beghi
Prediction of integral type failures in semiconductor manufacturing through classification methods.
ETFA
(2013)