Prediction of integral type failures in semiconductor manufacturing through classification methods.
Gian Antonio SustoSeán F. McLooneDaniele PaganoAndrea SchirruSimone PampuriAlessandro BeghiPublished in: ETFA (2013)
Keyphrases
- machine learning methods
- neural networks and support vector machines
- benchmark datasets
- machine learning algorithms
- classification method
- classification systems
- support vector machine
- benchmark data sets
- pattern recognition
- preprocessing
- significant improvement
- computational cost
- classification models
- density estimation
- decision trees
- semiconductor manufacturing
- robust classification
- classification decisions
- text classification
- classification algorithm
- class labels
- data sets
- image classification
- supervised learning
- classification accuracy
- feature space
- support vector
- feature extraction
- learning algorithm
- machine learning