Patrizia Vasquez

Publication Activity (10 Years)

Years Active: 2021-2023
Publications (10 Years): 2

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Publications

Umberto Amato, Anestis Antoniadis, Italia De Feis, Domenico Fazio, Caterina Genua, Irène Gijbels, Donatella Granata, Antonino La Magna, Daniele Pagano, Gabriele Tochino, Patrizia Vasquez
Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry. Sensors 23 (14) (2023)
Geert H. van Kollenburg, Mike Holenderski, Patrizia Vasquez, Nirvana Meratnia
Predictive discarding of wafers based on power leakage predictions from single layer misalignment data. ISM (2021)