Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry.
Umberto AmatoAnestis AntoniadisItalia De FeisDomenico FazioCaterina GenuaIrène GijbelsDonatella GranataAntonino La MagnaDaniele PaganoGabriele TochinoPatrizia VasquezPublished in: Sensors (2023)
Keyphrases
- plasma etching
- high density
- thin film
- low density
- electron microscopy
- data sets
- mechanical properties
- case study
- software maintenance
- three dimensional
- databases
- fastest growing
- semiconductor manufacturing
- maintenance activities
- multi layer
- control system
- power supply
- legacy systems
- financial services
- machine learning
- target audience
- real time