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Modeling Multivariate Relations in Multiblock Semiconductor Manufacturing Data Using Process PLS To Enhance Process Understanding.

Geert H. van KollenburgRichard VerhoevenMike HolenderskiNirvana MeratniaDaniele Pagano
Published in: WSC (2023)
Keyphrases
  • data sets
  • data analysis
  • database
  • data structure
  • semiconductor manufacturing
  • training data
  • data sources
  • data processing
  • data collection
  • neural network
  • data mining
  • image data
  • original data
  • data quality