Akemi Moniwa

Publication Activity (10 Years)

Years Active: 1987-1987
Publications (10 Years): 0

Publications

Akemi Moniwa, Toshiharu Matsuzawa, Tetsuo Ito, Hideo Sunami
A Three-Dimensional Photoresist Imaging Process Simulator for Strong Standing-Wave Effect Environment. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 6 (3) (1987)
Teruo Matsuzawa, Akemi Moniwa, N. Hasegawa, Hideo Sunami
Two-Dimensional Simulation of Photolithography on Reflective Stepped Substrate. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 6 (3) (1987)
Masanori Ohgo, Yasuko Takano, Akemi Moniwa, Shuichi Yamamoto, Yoshio Sakai, Hiroo Masuda, Hideo Sunami
A Two-Dimensional Integrated Process Simulator: SPIRIT-I. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 6 (3) (1987)